Semiconductor Temperature Sensors
The “Instrumented Wafer” typically finds application in semiconductor processing equipment where knowing and controlling the temperature at the surface of a silicon wafer is critical. While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any two dimensional surface.
Most common applications: Solder Reflow, Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Post Exposure Bake (PEB), Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), ION Implantation, Solar Cell, and many other thermally driven processes.