TC-1200
Please see PDF SEMI-090 for ordering information.
TC-1200 — High Temperature / High Purity — Temperature Range (-40°C to 1200°C)
The TC-1200 takes advantage of a very unique attachment method to allow for extremely high temperature operation. This method does not employ the use of bonding agent. Instead, the silicon is laser welded to hold the sensor in place.
Not only does this allow for high temperature operation, but it also creates one of the cleanest designs available. By eliminating the bonding agents there is no possibility of out gassing or other undesirable conditions.
This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. In using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.
While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.
The TC-1200 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.
Recommended Sensors
Type K Thermocouple (Chromel/Alumel) — The Type K thermocouple offers the best balance of range, accuracy, and reliability.
Type N Thermocouple (Nicrosil/Nisil) — Less popular than Type K, but slightly more resistant to high temperature oxidation and corrosion.
Type R Thermocouple (Platinum/Rhodium) — Recommended for high temperature applications. This sensor offers the highest possible accuracy and uniformity. (Note: cannot be used in oxygen reducing atmospheres. Also available in type S or B.)