TC-350H
Please see PDF SEMI-090 at the bottom of the page for ordering information.
TC-350H — High Performance — Temperature Range (-40°C to 350°C)
The TC-350H uses the smallest possible sensing elements to reduce thermal mass and increase the response time of each sensor. The material used to fabricate the sensors is carefully chosen for the highest possible accuracy and greatest sensor to sensor uniformity.
This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. In using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.
While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.
The TC-350 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.
Recommended Sensors
Type K Thermocouple (Chromel/Alumel) — The most popular sensor for use in this design. The Type K thermocouple offers the best balance of range, accuracy, and reliability.
Type T Thermocouple (Copper/Constantan) — Higher accuracy at the cost of a narrow temperature range. Finds use in high accuracy, low temperature applications.
